Modeling of Electromechanical Characteristics of Piezoresonance Pressure Sensors with Membrane Control of the Interelectrode Gap of a Piezoelectric Element
The paper considers the issues of increasing the simulation accuracy of perspective piezoresonance overpressure sensors with membrane control of the piezoelectric element interelectrode gap. A comparative analysis of elastic membrane elements characteristics made of alloys two different types, calculated by the existing methods for flat and corrugated membranes, and obtained by simulation in the COMSOL Multiphysics system is carried out. It is shown that the existing analytical methods for calculating membrane elements are of an approximate nature and allow only rough estimates to be obtained, since they do not take into account all the structural features of the elastic elements and are adapted to the experimental designs of sensors with a specific geometry. The elastic characteristics of the measuring diaphragm of pressure sensors with a variable interelectrode gap of excitation are calculated. The capacitance of the interelectrode gap of the membrane pressure sensor is determined. Numerical simulation of the stressed-deformed state of the corrugated membrane in the COMSOL Multiphysics software package was carried out. The operating characteristics of the piezoresonance sensor of excess pressure with variable inter electrode gap of excitation are studied. The developed three-dimensional model of the sensor of excessive pressure for medical applications makes it possible to significantly improve the accuracy of characteristics calculations of the stress-strain state of elements during their micro-displacements, remove the limitations on the structural features of the membrane and its attachment methods, and significantly shorten the time and costs for developing measuring transducers. The obtained results provide ample opportunities to optimize the design of the sensor, improve its accuracy and reduce the impact on it of destabilizing environmental factors.
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